Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 16
On features of metal and binary compound sputtering by low-energy ions
E.Yu. Zykova, V.E. Yurasova, S.S. ElovikovVolume:
267
Année:
2009
Langue:
english
Pages:
5
DOI:
10.1016/j.nimb.2009.05.027
Fichier:
PDF, 431 KB
english, 2009