Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 12-13

Effects of dynamic recovery on amorphization kinetics in 6H-SiC
William J. Weber, Lumin Wang, Yanwen Zhang, Weilin Jiang, In-Tae BaeVolume:
266
Année:
2008
Langue:
english
Pages:
4
DOI:
10.1016/j.nimb.2008.03.119
Fichier:
PDF, 232 KB
english, 2008