[IEEE 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Stockholm, Sweden (2014.04.7-2014.04.9)] 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Effective workfunction control in TmSiO/HfO2 high-k/metal gate stacks
Dentoni Litta, E., Hellstrom, P.-E., Ostling, M.Année:
2014
Langue:
english
DOI:
10.1109/ulis.2014.6813908
Fichier:
PDF, 235 KB
english, 2014