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[IEEE Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Kyoto, Japan (June 14-16, 2005)] Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Fermi level pinning engineering by Al compositional modulation and doped partial silicide for HfAlO/sub x/(N) CMOSFETs
Kadoshima, M., Ogawa, A., Takahashi, M., Ota, H., Mise, N., Iwamoto, K., Migita, S., Fujiwara, H., Satake, H., Nabatame, T., Toriumi, A.Année:
2005
Langue:
english
DOI:
10.1109/.2005.1469216
Fichier:
PDF, 425 KB
english, 2005