[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - High Q surface acoustic wave resonators in 2–3 GHz range using ScAlN/single crystalline diamond structure
Hashimoto, Ken-ya, Fujii, Takamasa, Sato, Shuhei, Omori, Tatsuya, Changjun Ahn,, Teshigahara, Akihiko, Kano, Kazuhiko, Umezawa, Hitoshi, Shikata, Shin-ichiAnnée:
2012
Langue:
english
DOI:
10.1109/ultsym.2012.0483
Fichier:
PDF, 903 KB
english, 2012