[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - Reliability investigations on stacked chip on MEMS
Kaulfersch, Eberhard, Winkler, Thomas, Bramer, Birgit, Hammacher, JensAnnée:
2011
Langue:
english
DOI:
10.1109/scd.2011.6068761
Fichier:
PDF, 2.87 MB
english, 2011