[Lviv Polytechnic Nat. Univ Experience of Designing and Application of CAD Systems in Microelectronics. Proceedings of the VI-th International Conference. CADSM 2001 - Lviv-Slavsko, Ukraine (12-17 Feb. 2001)] Experience of Designing and Applications of CAD Systems in Microelectronics. Proceedings of the VI-th International Conference. CADSM 2001 (IEEE Cat. No.01 EX473) - REA production efficacy estimation