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A kinetic Monte Carlo annealing assessment of the dominant features from ion implant simulations
I. Martin-Bragado, M. Jaraiz, P. Castrillo, R. Pinacho, J.E. Rubio, J. BarbollaVolume:
114-115
Année:
2004
Langue:
english
Pages:
4
DOI:
10.1016/j.mseb.2004.07.060
Fichier:
PDF, 93 KB
english, 2004