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[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology
Van Toan, Nguyen, Kubota, Tomohiro, Seknar, Halubai, Samukawa, Seiji, Ono, TakahitoAnnée:
2014
Langue:
english
DOI:
10.1109/nems.2014.6908747
Fichier:
PDF, 3.32 MB
english, 2014