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[IEEE International Symposium on Semiconductor Manufacturing - Austin, TX, USA (17-19 Sept. 1995)] Proceedings of International Symposium on Semiconductor Manufacturing - An investigation of thermally-sprayed aluminum oxide coatings for high-temperature electrostatic chucks (ESCs)
Swindeman, C.J., Seals, R.D., Murray, W.P., Cooper, M.H., Forbes, K.R.Année:
1995
Langue:
english
DOI:
10.1109/issm.1995.524397
Fichier:
PDF, 738 KB
english, 1995