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Tensile tests of micro anchors anodically bonded between Pyrex glass and aluminum thin film coated on silicon wafer
Yu-Qun Hu, Ya-Pu Zhao, Tongxi YuVolume:
48
Année:
2008
Langue:
english
Pages:
4
DOI:
10.1016/j.microrel.2008.04.016
Fichier:
PDF, 341 KB
english, 2008