Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography
Zhi-Dong Li, Zhen-Kui Shen, Wen-Yuan Hui, Zhi-Jun Qiu, Xin-Ping Qu, Yi-Fang Chen, Ran LiuVolume:
88
Année:
2011
Langue:
english
Pages:
4
DOI:
10.1016/j.mee.2011.01.055
Fichier:
PDF, 528 KB
english, 2011