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Improvement of TEOS-chemical mechanical polishing performance by control of slurry temperature
Nam-Hoon Kim, Pil-Ju Ko, Yong-Jin Seo, Woo-Sun LeeVolume:
83
Année:
2006
Langue:
english
Pages:
7
DOI:
10.1016/j.mee.2005.08.011
Fichier:
PDF, 360 KB
english, 2006