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[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - Managing annealing pattern effects in 45nm low power CMOS technology
Morin, P., Cacho, F., Beneyton, R., Dumont, B., Bidaud, M., Josse, E., Gallon, C., Ranica, R., Villaret, A., Bianchini, R., Devoivre, T., Serret, E., Binger, R., Barla, K., Haond, M., Colin, A., Bono,Année:
2009
Langue:
english
DOI:
10.1109/essderc.2009.5331536
Fichier:
PDF, 1.08 MB
english, 2009