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[IEEE 2008 58th Electronic Components and Technology Conference (ECTC 2008) - Lake Buena Vista, FL, USA (2008.05.27-2008.05.30)] 2008 58th Electronic Components and Technology Conference - Integration of high aspect ratio tapered silicon via for through-silicon interconnection
Ranganathan, N., Ebin, Liao, Linn, Linn, Lee, Wen Sheng Vincent, Navas, O.K., Kripesh, V., Balasubramanian, N.Année:
2008
Langue:
english
DOI:
10.1109/ectc.2008.4550077
Fichier:
PDF, 1.25 MB
english, 2008