[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (21-23 Oct. 1991)] [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Evaluating different sampling techniques for process control using automated patterned wafer inspection systems
Lazaroff, D., Bakker, D., Granath, D.R.Année:
1991
Langue:
english
DOI:
10.1109/asmc.1991.167391
Fichier:
PDF, 543 KB
english, 1991