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[IEEE 2009 International Symposium on Optomechatronic Technologies (ISOT 2009) - Istanbul, Turkey (2009.09.21-2009.09.23)] 2009 International Symposium on Optomechatronic Technologies - A high precision heterodyne interferometer for relative and absolute displacement measurement
Gohlke, Martin, Schuldt, Thilo, Weise, Dennis, Johann, Ulrich, Peters, Achim, Braxmaier, ClausAnnée:
2009
Langue:
english
DOI:
10.1109/isot.2009.5326055
Fichier:
PDF, 3.45 MB
english, 2009