
[IEEE 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) - Singapore (2013.12.11-2013.12.13)] 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) - The characteristics and factors of a wafer dicing blade and its optimized interactions required for singulating high metal stack lowk wafers
Shi, Koh Wen, Yow, K. Y.Année:
2013
Langue:
english
DOI:
10.1109/eptc.2013.6745714
Fichier:
PDF, 1.39 MB
english, 2013