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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments
Brosnihan, T.J., Bustillo, J.M., Pisano, A.P., Howe, R.T.Volume:
1
Année:
1997
Langue:
english
DOI:
10.1109/sensor.1997.613732
Fichier:
PDF, 826 KB
english, 1997