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[IEEE 1996 IEEE International SOI Conference Proceedings - Sanibel Island, FL, USA (30 Sept.-3 Oct. 1996)] 1996 IEEE International SOI Conference Proceedings - Impact of supplemental Si implantation into SIMOX buried oxide
Krska, J.-H.Y., Yoon, J.U., Kim, G.N., Joyner, K., Nauka, K., Chung, J.E.Année:
1996
Langue:
english
DOI:
10.1109/soi.1996.552546
Fichier:
PDF, 284 KB
english, 1996