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Elastooptical properties of SiON layers in an integrated optical interferometer used as a pressure sensor
Fischer, K., Muller, J., Hoffmann, R., Wasse, F., Salle, D.Volume:
12
Langue:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/50.265749
Date:
January, 1994
Fichier:
PDF, 616 KB
english, 1994