[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Line edge roughness and spacing effect on low-k TDDB characteristics
Chen, F., Lloyd, J. R., Chanda, K., Achanta, R., Bravo, O., Strong, A., McLaughlin, P. S., Shinosky, M., Sankaran, S., Gebreselasie, E., Stamper, A. K., He, Z.X.Année:
2008
Langue:
english
DOI:
10.1109/relphy.2008.4558874
Fichier:
PDF, 425 KB
english, 2008