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Electron beam enhanced multilayering and planarization in preimidized polyimides
Manepalli, R., Kovach, D.J., Farnsworth, K., Chiniwalla, P., Dusch, B., Bidstrup-Allen, S.A., Kohl, P.A.Volume:
24
Langue:
english
Journal:
IEEE Transactions on Advanced Packaging
DOI:
10.1109/6040.928752
Date:
May, 2001
Fichier:
PDF, 248 KB
english, 2001