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[IEEE 2013 IEEE International Interconnect Technology Conference - IITC - Kyoto, Japan (2013.06.13-2013.06.15)] 2013 IEEE International Interconnect Technology Conference - IITC - Void nucleation and growth during electromigration in 30 nm wide Cu lines: Impact of different interfaces on failure mode
Kirimura, T., Croes, K., Siew, Y. K., Vanstreels, K., Czarnecki, P., Ei-Mekki, Z., van der Veen, M. H., Dictus, D., Yoon, A., Kolics, A., Bommcls, J., Tokei, Zs.Année:
2013
Langue:
english
DOI:
10.1109/iitc.2013.6615555
Fichier:
PDF, 1.03 MB
english, 2013