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A new FEM approach for field and torque simulation of electrostatic microactuators
Delfino, F., Rossi, M.Volume:
11
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.800931
Date:
August, 2002
Fichier:
PDF, 498 KB
english, 2002