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Crystalline silicon tilting mirrors for optical cross-connect switches
Greywall, D.S., Busch, P.A., Pardo, F., Carr, D.W., Bogart, G., Hyongsok T. Soh,Volume:
12
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.818067
Date:
October, 2003
Fichier:
PDF, 557 KB
english, 2003