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[IEEE 2014 IEEE International Frequency Control Symposium (FCS) - Taipei, Taiwan (2014.5.19-2014.5.22)] 2014 IEEE International Frequency Control Symposium (FCS) - Wafer-level selective transfer method for FBAR-LSI Integration
Hikichi, Kousuke, Seiyama, Kazushi, Ueda, Masanori, Taniguchi, Shinji, Hashimoto, Ken-ya, Esashi, Masayoshi, Tanaka, ShujiAnnée:
2014
Langue:
english
DOI:
10.1109/fcs.2014.6859909
Fichier:
PDF, 551 KB
english, 2014