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Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing
Hyo-Heon Ko, Jun-Seok Kim, Jihyun Kim, Jun-Geol Baek, Sung-Shick KimVolume:
38
Année:
2011
Langue:
english
Pages:
9
DOI:
10.1016/j.eswa.2010.12.073
Fichier:
PDF, 1.12 MB
english, 2011