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Nitric Acid Oxidized ZrO$_2$ as the Tunneling Oxide of Cobalt Silicide Nanocrystal Memory Devices
Hu, Chih-Wei, Chang, Ting-Chang, Tu, Chun-Hao, Chen, Yang-Dong, Lin, Chao-Cheng, Chen, Min-Chen, Lin, Jian-Yang, Sze, Simon M., Tseng, Tseung-YuenVolume:
10
Langue:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2010.2095466
Date:
September, 2011
Fichier:
PDF, 602 KB
english, 2011