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[IEEE International Electron Devices Meeting 1998. Technical Digest - San Francisco, CA, USA (6-9 Dec. 1998)] International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) - Stress analysis of shallow trench isolation for 256 M DRAM and beyond
Kuroi, T., Uchida, T., Horita, K., Sakai, M., Inoue, Y., Nishimura, T.Année:
1998
Langue:
english
DOI:
10.1109/IEDM.1998.746300
Fichier:
PDF, 939 KB
english, 1998