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[IEEE International Electron Devices and Materials Symposium - Hsinchu, Taiwan (12-15 July, 1994)] International Electron Devices and Materials Symposium - New metal structure by sidewall encapsulation method
Eungsoo Kim,, Sang-Chul Shim,, Kyung-Won Cho,, Soon-Kwon Lim,, Kyu-Hyun Choi,Année:
1994
Langue:
english
DOI:
10.1109/EDMS.1994.771271
Fichier:
PDF, 332 KB
english, 1994