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Characterization and Experimental Verification of the Nonlinear Distortion in a Technique for Measuring the Relative Velocity Between Micromachined Structures in Normal Translational Motion
Dean, Robert Neal, Flowers, George T., Horvath, Roland, Sanders, Nicole, Hodel, A. Scottedward, Hung, John Y., Roppel, ThaddeusVolume:
7
Langue:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2007.891920
Date:
April, 2007
Fichier:
PDF, 975 KB
english, 2007