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[IEEE 2011 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kota Kinabalu, Sabah, Malaysia (2011.09.28-2011.09.30)] 2011 IEEE Regional Symposium on Micro and Nano Electronics - Vibration analysis of pMUT with polymer adhesion layer
Yaacob, Mohd Ikhwan Hadi, Arshad, Mohd Rizal, Manaf, Asrulnizam Abd, Rahman, Mohamad Faizal AbdAnnée:
2011
Langue:
english
DOI:
10.1109/RSM.2011.6088290
Fichier:
PDF, 1.17 MB
english, 2011