Hollow Waveguides With Low Intrinsic Photoluminescence Fabricated With PECVD Silicon Nitride and Silicon Dioxide Films
Holmes, Matthew R., Liu, Shuo, Keeley, Jared, Jenkins, Micah, Leake, Kaelyn, Schmidt, Holger, Hawkins, Aaron R.Volume:
23
Langue:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/LPT.2011.2162625
Date:
October, 2011
Fichier:
PDF, 695 KB
english, 2011