Microstructuring of p-Si(1 0 0) by localized electrochemical polishing using patterned agarose as a stamp
Li Zhang, Jin-Liang Zhuang, Xin-Zhou Ma, Jing Tang, Zhao-Wu TianVolume:
9
Année:
2007
Langue:
english
Pages:
5
DOI:
10.1016/j.elecom.2007.07.035
Fichier:
PDF, 824 KB
english, 2007