[IEEE IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. 2003 - Tampa, Fl, USA (4-8 May 2003)] IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 - Frequency-temperature analysis of MEMS AT-cut quartz resonators