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Internal stresses and stability of the tetragonal phase in zirconia thin layers deposited by OMCVD
B. Benali, A.M. Huntz, M. Andrieux, M. Ignat, S. PoissonnetVolume:
254
Année:
2008
Langue:
english
Pages:
7
DOI:
10.1016/j.apsusc.2008.03.147
Fichier:
PDF, 1.68 MB
english, 2008