Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications
Filipovic, Lado, Selberherr, Siegfried, Mutinati, Giorgio C., Brunet, Elise, Steinhauer, Stephan, Kock, Anton, Teva, Jordi, Kraft, Jochen, Siegert, Jorg, Schrank, Franz, Gspan, Christian, Grogger, WerVolume:
27
Langue:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2014.2298883
Date:
May, 2014
Fichier:
PDF, 22.09 MB
english, 2014
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