Numerical simulation of the gallium nitride thin film layer grown on 6-inch wafer by commercial multi-wafer hydride vapor phase epitaxy
Han, Xue-Feng, Hur, Min-Jae, Lee, Jae-Hak, Lee, Yoo-jin, Oh, Chung-seok, Yi, Kyung-WooVolume:
406
Langue:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2014.08.018
Date:
November, 2014
Fichier:
PDF, 883 KB
english, 2014