Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2008 Vol. 26; Iss. 3
Nitrogen and hydrogen plasma treatments of multiwalled carbon nanotubes
Jones, J. G., Waite, A. R., Muratore, C., Voevodin, A. A.Volume:
26
Année:
2008
Langue:
english
DOI:
10.1116/1.2917068
Fichier:
PDF, 1.06 MB
english, 2008