Low-Temperature Deposition of Hexagonal Boron Nitride via Sequential Injection of Triethylboron and N 2 /H 2 Plasma
Haider, Ali, Ozgit-Akgun, Cagla, Goldenberg, Eda, Okyay, Ali Kemal, Biyikli, Necmi, Brennecka, G.Volume:
97
Langue:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.13213
Date:
December, 2014
Fichier:
PDF, 1.58 MB
english, 2014