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[IEEE Asian Conference on Sensors, 2003. AsiaSense 2003. - Kebangsann, Malaysia (2003)] Asian Conference on Sensors, 2003. AsiaSense 2003. - Electrical testing for MEMS's piezoresistive pressure sensor
Zahria b. Abd Wahab, M., Sauli, Z.b., Ahmad, I., b. Suradil, W.Année:
2003
Langue:
english
DOI:
10.1109/ASENSE.2003.1224989
Fichier:
PDF, 142 KB
english, 2003