[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - A robust alternative for the DRAM capacitor of 50nm generation
Kwang Hee Lee,, Suk-Jin Chung,, Jin Yong Kim,, Ki-Chul Kim,, Jae-Soon Lim,, Kyuho Cho,, Jinil Lee,, Jeong-Hee Chung,, Hanjin Lim,, Kyungln Choi,, Sangho Han,, Soolk Jang,, Byeong-Yun Nam,Année:
2004
Langue:
english
DOI:
10.1109/IEDM.2004.1419308
Fichier:
PDF, 241 KB
english, 2004