[IEEE 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (8-12 July 2002)] Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614) - Isothermal em as highly accelerated test method for copper damascene lines
Kin Leong,, Yap Andrew,, Bee Hoon Lim,, Eng Chye Chua,, Yeow Kheng Lim,, Suat Cheng,, Khoo Sherry,Année:
2002
Langue:
english
DOI:
10.1109/IPFA.2002.1025631
Fichier:
PDF, 995 KB
english, 2002
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