[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Athermal annealing of ion-implanted silicon
Donnelly, D.W., Covington, B.C., Grun, J., Fischer, R.P., Peckerar, M., Felix, C.L., Djordjevic, B.B., Mignogna, R., Meyer, J.R., Ting, A., Manka, C.K.Année:
2001
Langue:
english
DOI:
10.1109/RTP.2001.1013757
Fichier:
PDF, 893 KB
english, 2001
File converter
Plus de résultats de recherche
More benefits 
