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Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
Chang, Chieh, Sakdinawat, AnneVolume:
5
Langue:
english
Journal:
Nature Communications
DOI:
10.1038/ncomms5243
Date:
June, 2014
Fichier:
PDF, 4.85 MB
english, 2014