
Low-temperature chemical vapor deposition of antimony films using diisopropylantimony hydride ((i-Pr)2SbH)
Gedridge, Robert W., Lee, Kenneth E., Lowe-Ma, CharlotteVolume:
5
Langue:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00031a017
Date:
July, 1993
Fichier:
PDF, 1.65 MB
english, 1993