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Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition
Kim, Seong Keun, Hoffmann-Eifert, Susanne, Waser, RainerVolume:
113
Langue:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp9021882
Date:
July, 2009
Fichier:
PDF, 1.09 MB
english, 2009