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[IEEE 2014 IEEE International Reliability Physics Symposium (IRPS) - Waikoloa, HI, USA (2014.6.1-2014.6.5)] 2014 IEEE International Reliability Physics Symposium - Aluminum charge/dipole passivation induced by hydrogen diffusion in high-k metal gate
Ribes, G., Barral, V., Chhun, S., Gros-Jean, M., Caubet, P., Petit, D.Année:
2014
Langue:
english
DOI:
10.1109/IRPS.2014.6860622
Fichier:
PDF, 2.43 MB
english, 2014