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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Oxidation of Suspended Stacked Silicon Nanowire for Sub-10nm Cross-Section Shape Optimization
Hubert, Alexandre, Colonna, Jean-Philippe, Bécu, Stéphane, Dupré, Cécilia, Maffini-Alvaro, Virginie, Hartmann, Jean-Michel, Pauliac, Sébastien, Vizioz, Christian, Aussenac, François, Carabasse,Volume:
13
Année:
2008
Langue:
english
DOI:
10.1149/1.2911500
Fichier:
PDF, 595 KB
english, 2008